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About

BRK Lithography Core

Overview of Services

BNC users have access to optical lithography, electron beam lithography, and nanoimprint lithography on wafers up to 4" and wafer pieces.

New Users!  You must complete specific training to conduct research within the Birck Nanotechnology Center.
Learn more and sign up here: https://www.purdue.edu/discoverypark/birck/resources/training.php
 
Kiosk Dashboard: Enable/Disable Tools for Use

Location and hours of operation

Hours Location

Facility Hours 24/7

Staffed Hours 8:00am-5:00pm

 

 Birk Nanotechnology Center

1205 West State Street

West Lafayette, IN 47907-2057

Links and Resources

  1. Birk Nanotechnology Center Website
  2. NanoHub Homepage
  3. Purdue E-Pubs Birk Nanotechnology Center
  4. NanoHub Research Page
  5. BNC Safety Systems
  6. BNC Equipment Installation Manual
  7. BNC Building Emergency Plan
  8. BNC Operating Policy and Procedure Manual

Contacts

Name Role Phone Email Location
Bill Rowe
Equipment and Process Owner - Electron Beam Lithography
 
(765)-496-8389
 
wrowe@purdue.edu
 
BRK 2287A
 
Justin Wirth
Lithography Processes and Nanofabrication Process Consultation
 
(765)-494-8203
 
jcwirth@purdue.edu
 
BRK 2287A
 
Joon Park
Equipment and Process Owner - Optical Lithography
 
(765)-494-4209
 
park218@purdue.edu
 
BRK 2287B
 

Available Equipment and Resources

► C - Lithography, Aligners (4200001860) (8)
► C - Lithography, E-Beam, 100 kV (4200001858) (1)
► C - Lithography, Spinners (4200001859) (5)
► Daily Entry Surcharge, Cleanroom - BRK 2100A (4200001868) (1)
► Lithography, E-Beam, 30 kV (4200001838) (1)
► Metrology, Femtosecond and Raman (4200001840) (1)
► Space Reservation (No Cost) (1)