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Semiconductor/Research Grade Evaporation/Sputtering tools within the Scifres Cleanroom of the Birck Nanotechnology Center of Purdue University. Each system is setup to deposit a wide variety of metals/dielectrics. Films such as magnetic materials are used in specific Evaporator/Sputtering systems and are kept separated from contact metals.
| Hours | Location |
|
Facility Hours 24/7 Staffed Hours 8:00am-5:00pm |
Birck Nanotechnology Center 1205 West State Street West Lafayette, IN 47907-2057 |
| Name | Role | Phone | Location | |
|---|---|---|---|---|
| Dave Lubelski |
Core Manager
|
765-494-9102
|
Lubelski@purdue.edu
|
Brk 2287B
|
| Dan Witter |
Core Manager
|
765-496-1174
|
dwitter@purdue.edu
|
BRK 2287B
|
| Price list |
| ► C - Deposition, Flex Compatible PVD, Per Run (4200001862) (2) | |||
| Name | Description | Price | |
|---|---|---|---|
| C - Lesker E-Beam Evaporator - Flexible Substrate Compatible System Usage Fee |
per use |
Internal
$150.00
Run
External Non-Profit $286.00 Run External Small Business $286.00 Run External For Profit $323.00 Run |
|
| C - PVD Sputtering System - Flexible Substrate Compatible System Usage Fee |
per use |
Internal
$150.00
Run
External Non-Profit $286.00 Run External Small Business $286.00 Run External For Profit $323.00 Run |
|
| ► C - Deposition, PVD and Electroplating, Per Run (4200001863) (11) | |||
| Name | Description | Price | |
| Annealing Charge |
Use this rate if you are annealing your sample only. |
Internal
$0.00
Run
External Non-Profit $0.00 Run External Small Business $0.00 Run External For Profit $0.00 Run |
|
| C - CHA E-Beam Evaporator #1 System Usage Fee |
per use |
Internal
$101.00
Run
External Non-Profit $196.00 Run External Small Business $196.00 Run External For Profit $221.00 Run |
|
| C - CHA E-Beam Evaporator #2 System Usage Fee |
per use |
Internal
$101.00
Run
External Non-Profit $196.00 Run External Small Business $196.00 Run External For Profit $221.00 Run |
|
| C - Lesker E-Beam Evaporator System Usage Fee |
per use |
Internal
$101.00
Run
External Non-Profit $196.00 Run External Small Business $196.00 Run External For Profit $221.00 Run |
|
| C - Leybold E-Beam Evaporator System Usage Fee |
per use |
Internal
$101.00
Run
External Non-Profit $196.00 Run External Small Business $196.00 Run External For Profit $221.00 Run |
|
| C - PVD E-Beam Evaporator - Glancing Angle Deposition (GLAD) System Usage Fee |
per use |
Internal
$101.00
Run
External Non-Profit $196.00 Run External Small Business $196.00 Run External For Profit $221.00 Run |
|
| C - PVD E-Beam Evaporator - Metal/Magnetic Sources System Usage Fee |
per use |
Internal
$101.00
Run
External Non-Profit $196.00 Run External Small Business $196.00 Run External For Profit $221.00 Run |
|
| C - PVD Sputtering System - 4 Target Magnetic Sources System Usage Fee |
per use |
Internal
$101.00
Run
External Non-Profit $196.00 Run External Small Business $196.00 Run External For Profit $221.00 Run |
|
| C - PVD Sputtering System - 6 Target Magnetic Sources System Usage Fee |
per use |
Internal
$101.00
Run
External Non-Profit $196.00 Run External Small Business $196.00 Run External For Profit $221.00 Run |
|
| C - PVD Sputtering System - Metal/Dielectric Sources System Usage Fee |
per use |
Internal
$101.00
Run
External Non-Profit $196.00 Run External Small Business $196.00 Run External For Profit $221.00 Run |
|
| C - PVD Sputtering System - Nitride System Usage Fee |
per use |
Internal
$101.00
Run
External Non-Profit $196.00 Run External Small Business $196.00 Run External For Profit $221.00 Run |
|
| ► Deposition, PLD, Per Run (4200001839) (1) | |||
| Name | Description | Price | |
| PVD Pulsed Laser Deposition (PLD) System Usage Fee |
Pricing structure will change depending upon pricing increases or decreases of the global price of KrFl gas. |
Internal
$400.00
Run
External Non-Profit $622.00 Run External Small Business $622.00 Run External For Profit $709.00 Run |
|
| ► Staff Time, Engineering (4200001835) (1) | |||
| Name | Description | Price | |
| Engineering Staff Time |
Internal
$66.00
/hr
External Non-Profit $126.00 /hr External Small Business $126.00 /hr External For Profit $142.00 /hr |
||
| ► Storeroom, PVD Sources, Evaporating Material (4200001861) (27) | |||
| Name | Description | Price | |
| Ag (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Al (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Al2O3 (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Au (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.71
nanometer
External Non-Profit $1.36 nanometer External Small Business $1.36 nanometer External For Profit $1.36 nanometer |
|
| B (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.25
nanometer
External Non-Profit $0.48 nanometer External Small Business $0.48 nanometer External For Profit $0.48 nanometer |
|
| Co (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Cr (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.20
nanometer
External Non-Profit $0.39 nanometer External Small Business $0.39 nanometer External For Profit $0.39 nanometer |
|
| Cu (per nanometer)-Evaporating |
Quantity is per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Er (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Fe (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Ge (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| ITO (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Mn (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Mo (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Nb (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Ni (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Ni/Cr (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Pd (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.71
nanometer
External Non-Profit $1.36 nanometer External Small Business $1.36 nanometer External For Profit $1.36 nanometer |
|
| Pt (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.85
nanometer
External Non-Profit $1.33 nanometer External Small Business $1.33 nanometer External For Profit $1.33 nanometer |
|
| Py (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Sc (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.27
nanometer
External Non-Profit $0.52 nanometer External Small Business $0.52 nanometer External For Profit $0.52 nanometer |
|
| Si (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| SiO2 (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Ta (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Ta2O5 (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| Ti (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| TiO2 (per Nanometer)- Evaporating |
Quantity is in per Nanometer |
Internal
$0.10
nanometer
External Non-Profit $0.20 nanometer External Small Business $0.20 nanometer External For Profit $0.20 nanometer |
|
| ► Storeroom, PVD Sources, Nitride Material (4200001861) (6) | |||
| Name | Description | Price | |
| Ag (per Nanometer)- Nitride |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Al (per Nanometer)- Nitride |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Cr (per Nanometer)- Nitride |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Sc (per Nanometer)- Nitride |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Ti (per Nanometer)- Nitride |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Zr (per Nanometer)- Nitride |
Quantity is in per Nanometer |
Internal
$0.19
nanometer
External Non-Profit $0.37 nanometer External Small Business $0.37 nanometer External For Profit $0.37 nanometer |
|
| ► Storeroom, PVD Sources, PLD Material (4200001861) (5) | |||
| Name | Description | Price | |
| Al (per Nanometer)- PLD |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Cr (per Nanometer)- PLD |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Sc (per Nanometer)- PLD |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Ti (per Nanometer)- PLD |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Zr (per Nanometer)- PLD |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| ► Storeroom, PVD Sources, Sputtering Material (4200001861) (36) | |||
| Name | Description | Price | |
| Ag (per Nanometer)-Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Al (per Nanometer)-Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Al1%Si (per Nanometer)-Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Al2O3 (per Nanometer)-Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Au (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$1.14
nanometer
External Non-Profit $2.17 nanometer External Small Business $2.17 nanometer External For Profit $2.17 nanometer |
|
| B (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.40
nanometer
External Non-Profit $0.77 nanometer External Small Business $0.77 nanometer External For Profit $0.77 nanometer |
|
| Co (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| CoFeB (per Nanometer)-Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Cr (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Cu (per Nanometer)-Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Er (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.20
nanometer
External Non-Profit $0.39 nanometer External Small Business $0.39 nanometer External For Profit $0.39 nanometer |
|
| Fe (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External For Profit $0.32 nanometer External Small Business $0.37 nanometer |
|
| Ge (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| ITO (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| MgO (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Mn (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Mo (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Nb (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Ni (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Ni/Cr (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Pd (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$1.09
nanometer
External Non-Profit $2.08 nanometer External Small Business $2.08 nanometer External For Profit $2.08 nanometer |
|
| Pt (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$2.53
nanometer
External Non-Profit $4.83 nanometer External Small Business $4.83 nanometer External For Profit $4.83 nanometer |
|
| Py (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Ru (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Sc (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.43
nanometer
External Non-Profit $0.82 nanometer External Small Business $0.82 nanometer External For Profit $0.82 nanometer |
|
| Si (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Si3N4 (per Nanometer)-Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| SiC (per Nanometer)-Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| SiO2 (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Ta (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Ta2O5 (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Ti (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| TiN (per Nanometer)-Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| TiO2 (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| W (per Nanometer)- Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
| Zr (per Nanometer)-Sputtering |
Quantity is in per Nanometer |
Internal
$0.16
nanometer
External Non-Profit $0.32 nanometer External Small Business $0.32 nanometer External For Profit $0.32 nanometer |
|
