BRK Furnace Core

Overview of Services

The Furnace Core of the Scifres Cleanroom of the Birck Nanotechnology Center provides semiconductor/research grade furnace processing tools for fabrication and annealing of clean samples.  Films such as silicon dioxide, silicon nitride, low temperature oxide, and polysilicon are films that may be grown/deposited.  In addition to film deposition, annealing furnaces provide additional processing for further treatment.  Annealing may be done with a typical tube furnace or a rapid thermal annealing furnace.  Please contact the furnace core manager for any and all questions.

New Users!  You must complete the required prerequisites to conduct research within Birck Nanotechnology Center.  These prerequisits may include one or more of the following courses;  BNC-105 (General Building Orientation), BNC-150 (Fume Hood Safety Training), BNC-206 (Cleanroom Training).  Please follow the link to learn more: https://www.purdue.edu/discoverypark/birck/resources/training.php

Leadership

Ron Reger
Cleanroom Equipment Manager
Phone: 765-496-6667
Email: rreger@purdue.edu

Location and hours of operation

Hours Location

Facility Hours 24/7

Staffed Hours 8:00am-5:00pm

Birk Nanotechnology Center

1205 West State Street

West Lafayette, IN 47907-2057

 

Links and Resources

  1. Birk Nanotechnology Center Website
  2. NanoHub Homepage
  3. Purdue E-Pubs Birk Nanotechnology Center
  4. NanoHub Research Page
  5. BNC Safety Systems
  6. BNC Equipment Installation Manual
  7. BNC Building Emergency Plan
  8. BNC Operating Policy and Procedure Manual

Contacts

Name Role Phone Email Location
Dan Hosler
Core Manager
 
765-496-3883
 
dhosler@purdue.edu
 
BRK 2287 C
 
Ron Reger
Cleanroom Equipment Manager
 
765-496-6667
 
rreger@purdue.edu
 
BRK 2289
 

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